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Observation of Crystalline Contrast with Using Low Energy Electrons in SEM

Published online by Cambridge University Press:  05 August 2007

N Kikuchi ,
T Shinzawa ,
T Negishi ,
K Ogura  and
C Nielsen
N Kikuchi
Affiliation:
JEOL Ltd,Japan
T Shinzawa
Affiliation:
JEOL Ltd,Japan
T Negishi
Affiliation:
JEOL Ltd,Japan
K Ogura
Affiliation:
JEOL Ltd,Japan
C Nielsen
Affiliation:
JEOL USA,Inc
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 972 - 973
Copyright
© 2007 Microscopy Society of America

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