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Tomography of High-k Dielectrics on Fin-FET Sidewalls

Published online by Cambridge University Press:  03 August 2008

B Foran ,
N Ives  and
P Lysaght
B Foran
Affiliation:
The Aerospace Corporation
N Ives
Affiliation:
The Aerospace Corporation
P Lysaght
Affiliation:
SEMATECH
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 444 - 445
Copyright
© 2008 Microscopy Society of America

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