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Investigation of Boron Delta-layers in Silicon Measured by Atom Probe Tomography (APT)

Published online by Cambridge University Press:  26 July 2009

C Klein ,
S Mutas ,
A Würfel  and
E Zschech
C Klein
Affiliation:
AMD LLC & Co KG,Germany
S Mutas
Affiliation:
Fraunhofer-Center Nanoelectronic Technologies,Germany
A Würfel
Affiliation:
GWT-TUD GmbH,Germany
E Zschech
Affiliation:
AMD LLC & Co KG,Germany

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 282 - 283
Copyright
Copyright © Microscopy Society of America 2009