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Future Prospects for SEM-based Defect Analysis using Fast Electrons

Published online by Cambridge University Press:  01 August 2010

YN Picard ,
RJ Kamaladasa ,
N Kumar ,
C Trager-Cowan ,
W Jiang ,
M Skowronski ,
PA Salvador ,
H Behmemburg ,
C Giesen  and
AP Day
...Show all authors
YN Picard
Affiliation:
Carnegie Mellon University
RJ Kamaladasa
Affiliation:
Carnegie Mellon University
N Kumar
Affiliation:
University of Strathclyde, United Kingdom
C Trager-Cowan
Affiliation:
University of Strathclyde, United Kingdom
W Jiang
Affiliation:
Carnegie Mellon University
M Skowronski
Affiliation:
Carnegie Mellon University
PA Salvador
Affiliation:
Carnegie Mellon University
H Behmemburg
Affiliation:
AIXTRON AG, Germany
C Giesen
Affiliation:
AIXTRON AG, Germany
AP Day
Affiliation:
Aunt Daisy Scientific Ltd, United Kingdom
G England
Affiliation:
K E Developments Ltd, United Kingdom

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 608 - 609
Copyright
Copyright © Microscopy Society of America 2010