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Advantages of Beam Deceleration for Low kV EDS Analysis

Published online by Cambridge University Press:  23 September 2015

D. Edwards ,
N. Erdman ,
D. Guarrera ,
M. Shibata ,
V. Robertson ,
F. Timischl  and
Y. Nemoto
D. Edwards
Affiliation:
JEOL, USA Inc., 11 Dearborn Rd, Peabody, MA 01960
N. Erdman
Affiliation:
JEOL, USA Inc., 11 Dearborn Rd, Peabody, MA 01960
D. Guarrera
Affiliation:
JEOL, USA Inc., 11 Dearborn Rd, Peabody, MA 01960
M. Shibata
Affiliation:
JEOL, USA Inc., 11 Dearborn Rd, Peabody, MA 01960
V. Robertson
Affiliation:
JEOL, USA Inc., 11 Dearborn Rd, Peabody, MA 01960
F. Timischl
Affiliation:
JEOL Technics Ltd, Akishima, Japan
Y. Nemoto
Affiliation:
JEOL Technics Ltd, Akishima, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 681 - 682
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] [2] Bell, D.C. & Erdman, N., in Low Voltage Electron Microscopy: Principles and Applications (2012) 1–30.Google Scholar
[2] Rowlands, N., et al., Microscopy and Microanalysis 15(S2 (2009) 548–549.CrossRefGoogle Scholar
[3] Edwards, D., et al., Microscopy and Microanalysis 20(S3 (2014) 646–647.CrossRefGoogle Scholar