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Investigation of Image Contrast of Energy-Filtered BSE Image at Ultra Low Voltage

Published online by Cambridge University Press:  23 September 2015

Y. Hashimoto
Affiliation:
Nano-Technology Systems Div., Hitachi High Technologies America, Clarksburg, MD 20871, USA
A. Muto
Affiliation:
Nano-Technology Systems Div., Hitachi High Technologies America, Clarksburg, MD 20871, USA
T. Walters
Affiliation:
Institute for Electronics and Nanotechnology, Georgia Institute of Technology, Atlanta, GA 30332, USA
E. Woods
Affiliation:
Institute for Electronics and Nanotechnology, Georgia Institute of Technology, Atlanta, GA 30332, USA
D. C. Joy
Affiliation:
Material Science and Engineering, University of Tennessee, Knoxville, TN 37831, USA Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA

Abstract

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Type
Abstract
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

[1] Hashimoto, Y., et al., Microsc. Microanal. 19(Suppl 2), 11761177 (2013).CrossRefGoogle Scholar
[2] Hashimoto, Y., et al., Microsc. Microanal. 20(Suppl 3), 3435 (2014).Google Scholar
[3] Mullerova, Ilona, Scanning 23, 379 (2001).CrossRefGoogle ScholarPubMed