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Epitaxial PZT films for MEMS printing applications

  • Thin-film piezoelectric MEMS
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Abstract

Films of piezoelectric and ferroelectric oxides have been widely investigated for various applications, including microelectromechanical systems (MEMS) for printing. Pb(Zr,Ti)O3 is of particular interest due to its excellent piezoelectric properties. Control of the density, crystalline orientation, and compositional uniformity is essential to obtain these properties. In this article, we review recent progress on the fabrication of epitaxial Pb(Zr,Ti)O3 films, in which the aforementioned control can be achieved. We discuss the different approaches used for the deposition of the epitaxial piezoelectric layer as well as the achieved degrees of the epitaxy. Furthermore, the integration of these piezoelectric layers in MEMS and the corresponding performance are discussed.

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Acknowledgements

H.F. acknowledges a grant from the Japan Society for the Promotion of Science (JSPS) through the Funding Program for World-Leading Innovative R&D on Science and Technology (FIRST Program), initiated by the Council for Science and Technology Policy (CSTP) and Ministry of Education, Culture, Sports, Science and Technology of Japan. T.Y. acknowledges a grant from the Japan Science and Technology Agency (JST) through the Precursory Research for Embryonic Science and Technology (PRESTO) program. A.S. and S.G. acknowledge support from the Swiss National Science Foundation through the National Center of Competence in Research “Materials with Novel Electronic Properties-MaNEP” and the EU Project Oxides. Discussions with P. Zubko are gratefully acknowledged. G.R., M.D., and I.S. acknowledge support from the Dutch government through the SmartMix programme. Discussions with M. Nguyen, E. Houwman, R. Steenwelle, and X. Wan are gratefully acknowledged.

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Authors and Affiliations

  1. Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, Japan

    Hiroshi Funakubo

  2. SolMateS, The Netherlands

    Matthijn Dekkers

  3. University of Naples Federico II, Italy

    Alessia Sambri

  4. Condensed Matter Physics Department, University of Geneva, Switzerland

    Stefano Gariglio

  5. Oce-Technologies B.V, The Netherlands

    Igor Shklyarevskiy

  6. University of Twente, The Netherlands

    Guus Rijnders

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  1. Hiroshi Funakubo
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  2. Matthijn Dekkers
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Correspondence to Hiroshi Funakubo.

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Funakubo, H., Dekkers, M., Sambri, A. et al. Epitaxial PZT films for MEMS printing applications. MRS Bulletin 37, 1030–1038 (2012). https://doi.org/10.1557/mrs.2012.271

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